minimum detectable quantity

SO₂、H₂S、HF、NO、NO₂、N₂O

≤0.1μL/L

CO

≤0.5μL/L

SF₆

0.01%

CF₄

0.01%

N₂

0.01%

O₂

0.001%

precision

SO₂、H₂S、HF

measured value ≤ 10 μL/L, error≤ ± 0.5 μL/L

measured value > 10 μL/L,  error≤ ± 5%.

CO

measured value≤ 50 μL/L, error ≤ ± 2.0 μL/L

measured value> 50 μL/L, error  ≤ ± 4%

NO、NO₂、N₂O

± 5% or ± 2 μL/L (whichever is greater)

SF₆

pure gas

≤±0.1%(W/W)

mixed gas

≤±0.5%

CF₄

≤±0.5%

N₂

≤±0.5%

O₂

≤±0.05%